METHOD OF ITEMS ION BEAM FABRICATION

The method includes implantation of metal and non-metal ions and differs from the traditional method in that a two-layer structure is created in the surface area of the item. The first layer is formed by implantation of metal and/or non-metal ions selected from the group of elements forming solid compounds with ions energy of 80 to 200 kiloelectronvolts (keV). The second layer is formed with the ions energy reduced to 20 to 80 keV and a fluence (flow) of 5*10¹⁶ - 5*10¹⁷ ion/cm², with niobium being one of the implanted elements of the second layer.

Another modification of the offered method differs in that the second layer is formed with reaction gas supplied at a pressure of 10^-2 to 10 Pa.

Institute of strength physics and material authority of Siberian Department of Russian Academy of Sciences (SO RAN) 634021, Tomsk, pr. Akademicheskiy 2/1, IFPM SO RAN, patent department.

Back